| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a detection mark which can detect the amount of the positional gap between a lithographic medium and a picture to be drawn with a sufficient accuracy, a detecting method using the detection mark concerned, an image drawing method of the detection mark concerned, and drafting equipment for drawing the detection mark concerned. Ž<P>SOLUTION: The detection mark for detecting the relative position of the lithographic medium and the drawn picture is provided with a standard scale made up by two or more first nearly straight lines which are parallel each other and a positional gap enlargement pattern which is arranged so as to cross the two or more first nearly straight lines composing the standard scale and which is the second nearly straight line inclined against the first nearly straight line. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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