MEM SWITCH AND METHOD FOR MANUFACTURING THE SAME

摘要

An MEM switch comprises a substrate on which a signal line having fixed contacts is formed, a movable board equipped with movable contacts, a flexible support for supporting the movable board, and an electrostatic actuator and a piezoelectric actuator arranged to allow the movable contacts to contact the fixed contacts. The MEM switch is characterized in that the movable board has a length and a width, is provided with movable contacts in the center in the length direction, thereof, and has electrostatic movable electrode plates arranged at movable electrode holding portions formed on the opposite sides thereof in the length direction. The support consists of four flexible strips each arranged on the outside of each electrode holding portion and externally to the opposite sides of the movable board in the width direction. The strips are arranged along the length direction of the movable board and each strip has one end coupled with the movable board, and the other end held on a substrate. A piezoelectric element is arranged on the upper surface of each strip on the outside of the movable board in the width direction, and is constituted such that a stress generated from the piezoelectric actuator acts on the coupling point of each strip and the movable board.