PROCESSING CONTROL DEVICE AND LASER PROCESSING DEVICE
摘要
<p>Disclosed is a processing control device that controls the focal position of a laser beam, when a laser processing mechanism (300) concentrates light onto a prescribed focal position and laser-processes an article to be processed. The processing control device comprises: a computing unit (22) that computes the amount of misalignment of the focal position in the light axis direction that shifts during laser processing, by the irradiation position of a laser beam; and a controller (23) that controls the focal position of a laser beam that is laser-processing so as to eliminate the focal position misalignment, based on the amount of focal position misalignment computed by the computing unit (22).</p>
申请公布号
WO2009122758(A1)
申请公布日期
2009.10.08
申请号
WO2009JP01575
申请日期
2009.04.03
申请人
MITSUBISHI ELECTRIC CORPORATION;TAKAHASHI, KEIJI;MUKAE, TOMONORI;YOKOI, SHIGERU;YAMAMOTO, TATSUYA