| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing a laminate, which can provide a gas-barrier film improved in adhesiveness between a polymer film and an inorganic oxide layer and having a gas-barrier performance higher than that of a conventional one. SOLUTION: The method for manufacturing the laminate having an inorganic oxide layer on one surface or both surfaces of a polymer film includes a film deposition process for depositing the inorganic oxide layer and a treating process for performing a plasma treatment by RIE (Reactive Ion Etching) and is characterized by simultaneously performing the film deposition process and the treating process. COPYRIGHT: (C)2010,JPO&INPIT
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