| 摘要 |
PROBLEM TO BE SOLVED: To provide a drawing system which can control parameters. SOLUTION: The drawing system 100 includes: control units 122, 124 and 126 having different communication protocols; a drawing device 110 which is controlled by the control units 122, 124 and 126 and draws a pattern in a sample using an electron beam 200; a database 140 which receives parameter information from external sub-computers and stores it; an interface circuit group 139 which outputs to the control units 122, 124 and 126 the received parameter information in conformity with the communication protocol; a main computer 160; and an I/F circuit group 170 which receives a request from the main computer 160, converts the parameter information set in the control units 122, 124 and 126 into the communication protocol used by the main computer 160 not via the database 140, and transmits it. COPYRIGHT: (C)2010,JPO&INPIT
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