发明名称 |
PHOTOSENSITIVE FILM LAMINATION METHOD, RESIST PATTERN FORMATION METHOD, AND PRINTED CIRCUIT BOARD MANUFACTURING METHOD |
摘要 |
<p>A photosensitive film, which has a support film and a 2 to 10-µm thick photosensitive resin composition layer formed on said support film, is placed on a copper substrate with the photosensitive resin composition layer in contact with the copper substrate and is laminated to the copper substrate under a lamination pressure of 1-10 MPa. As a result, even though the aforementioned photosensitive resin composition layer thickness is 10 µm or thinner, the occurrence of microvoids can be inhibited sufficiently when the photosensitive film is laminated to the copper substrate, so a sufficient level of resolution can be achieved.</p> |
申请公布号 |
WO2009123096(A1) |
申请公布日期 |
2009.10.08 |
申请号 |
WO2009JP56470 |
申请日期 |
2009.03.30 |
申请人 |
HITACHI CHEMICAL COMPANY, LTD.;HITACHI PLANT TECHNOLOGIES, LTD.;SHINDOU, MASANORI;TAKANO, SHINJI;HAYASHI, TAKEHIKO;MIYOSHI, TETSUYA |
发明人 |
SHINDOU, MASANORI;TAKANO, SHINJI;HAYASHI, TAKEHIKO;MIYOSHI, TETSUYA |
分类号 |
H05K3/06;B32B15/08;G03F7/004;G03F7/16;H05K3/18 |
主分类号 |
H05K3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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