| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To detect both small defects formed in a part of an individual recess part and convex part, and defects larger than the lattice pitch formed straddling the recess part and convex part. <P>SOLUTION: While rotating and moving a fixed jig 10, to which an object to be inspected OB is fixed, to the direction of the rotating axis, the fine lattice structure G of the object to be inspected is irradiated with a laser light, and the intensity and polarization state of the reflected light is detected. If the intensity of the reflected light is lower than a reference level, it is determined that there are defects larger than the lattice pitch formed straddling the recess part and the convex part in the irradiated site. Also, if the polarization state of the reflected light is different from the ideal polarization state beyond the permissible value in the area excluding the site where the large defects are determined to be present, it is determined that there are small defects in the irradiated site in a part of the individual recess part and convex part. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
