| 摘要 |
PROBLEM TO BE SOLVED: To provide an imaging device having a compact configuration capable of efficiently recognizing the external form of various substrates including a transparent substrate. SOLUTION: The imaging device includes: a substrate support sheet 21 for supporting a sapphire substrate S; an imaging element 18; a first light source 12 having an opening 15 at the central part where a light passes, the light emitted from which irradiates the outer circumference of the sapphire substrate S; a beam splitter 16; a second light source 11, the light emitted from which is reflected at the beam splitter 16, passes through the opening 15 and irradiates the central part of the sapphire substrate S; and an imaging lens 17 for incorporating the light reflected at the surface of the sapphire substrate S into the imaging element 18. COPYRIGHT: (C)2010,JPO&INPIT
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