| 发明名称 |
NANOPARTICLE REVERSIBLE CONTRAST ENHANCEMENT MATERIAL AND METHOD |
| 摘要 |
The invention is to a reversible photobleachable material comprised of nanoparticles of indium gallium oxide or gallium oxide, and a method of exposing a substrate, such as in semiconductor manufacture, using same.
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| 申请公布号 |
US2009253072(A1) |
申请公布日期 |
2009.10.08 |
| 申请号 |
US20090416805 |
申请日期 |
2009.04.01 |
| 申请人 |
PETRUSKA MELISSA A;PAN GUIQUAN;BAUM THOMAS H;BOGGS KARL E |
发明人 |
PETRUSKA MELISSA A.;PAN GUIQUAN;BAUM THOMAS H.;BOGGS KARL E. |
| 分类号 |
G03F7/20;G03F7/004 |
主分类号 |
G03F7/20 |
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