| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an image sampling device and sample inspection device for preventing disturbance, especially for blocking radiation such as cosmic rays. <P>SOLUTION: The image sampling device and sample inspection device include a light source for irradiating a sample having a pattern, a sensor for receiving the light radiated from the light source to the sample and sampling a pattern image, an optical path changing body that is arranged in front of the sensor and bends an optical path, and a blocking body that surrounds the optical path and blocks the radiation coming into the sensor. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
