| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring system and a three-dimensional shape measuring method capable of correcting an error generated by vibration during conveyance. Ž<P>SOLUTION: The three-dimensional shape measuring system 1 includes the first reference object 11 and the second reference object 22. A three-dimensional shape calculation part 18b corrects an image shape of reflected light by a measuring object surface by using the expression (3) based on each image shape of the first reference object 11 and the second reference object 22 conveyed together with a measuring object 10. By performing correction based on the shape of an object conveyed together with the measuring object 10 in this way, time data shift caused by, for example, vibration of a production machine arranged on a front/rear stage of conveyance can be corrected. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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