| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a total reflection fluorescent X-ray analyzer, can automatically set theincident angle of the primary X-ray beam to a sample, using a simple constitution. Ž<P>SOLUTION: In this total reflection fluorescent X-ray analyzer equipped with a stage 18 and a control means 24, can adjust rotation and inclination of a sample 1, on the basis of a principle wherein, if a reference X-ray 5a having the same intensity I1 as that prior to rotation is measured, even if the sample 1 is rotated by 180 degrees, the incident angle θ of the primary X-ray beam 3 into the sample surface 1a is also the same as that prior to rotation; deviation angle α+β from an ideal state , comprising an angle α formed between the axis Q of rotation by the stage 18 and a normal P on the stage surface 2a and an angle β formed between the stage surface 2a and the sample surface 1a, is determined as an incident angle correction value Δϕ; and correction is performed by subtracting the incident angle correction value Δϕ when setting the incident angle θ, by the control means 24. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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