发明名称 |
ROLL-TO-ROLL PROCESSING METHOD AND TOOLS FOR ELECTROLESS DEPOSITION OF THIN LAYERS |
摘要 |
A deposition method and a system are provided to deposit a CdS buffer layer on a surface of a solar cell absorber layer of a flexible workpiece from a process solution including all chemical components of the CdS buffer layer material. CdS is deposited from the deposition solution while the flexible workpiece is heated and elastically shaped by a heated shaping plate to retain the process solution on the solar cell absorber layer. The flexible workpiece is elastically shaped by pulling a back surface of the flexible workpiece into a cavity area in the heated shaping plate using an attractive force.
|
申请公布号 |
US2009246908(A1) |
申请公布日期 |
2009.10.01 |
申请号 |
US20090464673 |
申请日期 |
2009.05.12 |
申请人 |
SOLOPOWER, INC. |
发明人 |
BASOL BULENT M.;ERDEMLI SERKAN;ASHJAEE JALAL |
分类号 |
H01L21/20;B05C13/00 |
主分类号 |
H01L21/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|