发明名称 |
OPTICAL MEMBER, LIGHT ROUTING UNIT, AND EXPOSURE APPARATUS |
摘要 |
Embodiment of the present invention is to provide an optical member composed of calcium fluoride (fluorite) and being capable of preventing deterioration and demonstrating a long life even in use under severe conditions. An optical member of a preferred embodiment has a base material having an entrance face into which light is incident, a total reflection face totally reflecting the incident light, and an exit face from which the totally reflected light emerges to the outside, and made of a calcium fluoride crystal; and a protecting layer to control deterioration of the total reflection face by the light, which is provided on a surface outside the total reflection face in this base material.
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申请公布号 |
US2009244507(A1) |
申请公布日期 |
2009.10.01 |
申请号 |
US20090392722 |
申请日期 |
2009.02.25 |
申请人 |
NIKON CORPORATION |
发明人 |
TANI YASUHISA;NIISAKA SHUNSUKE |
分类号 |
G03B27/54;G02B5/04;G03F7/20 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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