APPARATUS FOR PLASMA TREATMENT OF HOLLOW BODIES

摘要

The present invention concerns an apparatus for plasma treatment of the internal wall surfaces of at least one hollow body comprising: - at least one holder (4) adapted to the external dimensions of the hollow body (12), - at least two metallic electrodes (8), wherein said apparatus comprises means (5) to adjust the distance between said electrodes and a system for plasma treatment of the internal wall surfaces of at least one hollow body, said system comprising said apparatus. It further concerns a method for chemical vapor deposition of a coating on the internal wall surfaces of at least one hollow body implementing said system. It further concerns a hollow body having an L/D ratio greater than or equal to 3, preferably greater than or equal to 5, L being the length and D being the diameter of said hollow body, said hollow body having an internal coating of a thickness between 300 and 500 nm having variations below 20%.