| 摘要 |
<p>It is possible to provide an angular velocity sensor which can suppress leak oscillation and appropriately improve the angular velocity detection accuracy. The angular velocity sensor includes: a pair of support beams (16, 17) arranged to oppose each other in the Y-axis direction when the X-axis direction is the longitudinal direction; anchors (22, 23) for fixing and supporting the center positions of the respective support beams; a pair of mass units (10, 11) arranged to oppose to each other between the support beams in the X-axis direction; springs (32-35) connecting the respective mass units to the support beams; an excitation unit for exciting the mass units; and a detection unit for detecting a displacement amount of the support beams displaced when the mass units are oscillated by the Coriolis force. If an angular velocity is generated around the Z-axis when the pair of the mass units (10, 11) is excited with the inverse phase in the X-axis direction by the excitation unit, the Coriolis force is generated in the Y-axis direction and the pair of mass units vibrates with the inverse phase in the Y-axis direction, which seesaw-oscillates the support beams against the anchors as fulcra in the Y-axis direction.</p> |
