| 摘要 |
The present invention provides a charged particle beam irradiating apparatus capable of irradiating a charged particle beam using both a wobbler method and a scanning method. A charged particle beam irradiating apparatus includes: scanning electromagnets that scan a charged particle beam; a wobbler irradiation unit that irradiates the charged particle beam using a wobbler method; a scanning irradiation unit that irradiates the charged particle beam using a scanning method; and a control unit that controls the wobbler irradiation unit and the scanning irradiation unit. In the charged particle beam irradiating apparatus, the control unit operates one of the wobbler irradiation unit and the scanning irradiation unit, and controls the other irradiation unit to be in a withdrawn state so as not to hinder the irradiation of the charged particle beam.
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