APPARATUS FOR TREATING SURFACE AND METHOD OF TREATING SURFACE

摘要

An aqueous solution containing an adhesion promoter in an amount of 20 vol.% or larger is heated to a temperature of 80-100°C and vaporized to produce a water-containing adhesion promoter vapor. The water-containing adhesion promoter vapor is caused to adhere to a surface of a substrate and to condense thereon. Thereafter, a dehydration reaction is caused by heating to adhere the adhesion promoter to the surface of the substrate.