APPARATUS FOR PLASMA TREATMENT OF HOLLOW BODIES

摘要

The present invention concerns an apparatus for plasma treatment of the interior walls of at least one hollow body comprising: - at least one support (4) adapted to the exterior dimensions of the hollow body (12), - at least two metallic electrodes (8) having, on their surfaces, lumens able to receive the said hollow bodies, characterized in that said apparatus comprises a hood (1 ) comprising means (10) for delivering a gas into the interior volumes of said hollow bodies and a system for plasma treatment of the interior walls of at least one hollow body, said system comprising said apparatus. It also concerns a method for chemical vapor deposition of a coating on the interior walls of at least one hollow body implementing said system. It also concerns a hollow body having an L/D ratio greater than or equal to 3, preferably greater than or equal to 5, L being the length and D being the diameter of said hollow body, said hollow body having an interior coating of a thickness between 300 and 500 nm having variations below 20%.