摘要 |
Plural detection boards 22 are stacked and fixed. The detection board 22 has a wiring board 24, a semiconductor detection device 25 fixed on an upper surface of the wiring board 24 and configured to detect radiation, and a spacer 28 fixed on the upper surface of the wiring board 24. Each of the detection boards 22 is provided so that the semiconductor detection device 25 and the spacer 28 have a designated positional relationship. In addition, the spacers 28 are stacked and matched in an X-Y plane surface with each other so that the detection boards 22 are fixed by fixing members 23a and 23b.
|