| 摘要 |
PROBLEM TO BE SOLVED: To provide an ejection device which ejects material onto an ejection target portion in an easy-to-spread manner. SOLUTION: The ejection device for applying a liquid material onto a plurality of the ejection target portions includes a stage for holding a substrate having the ejection target portions, an ejecting part having a first nozzle and a second nozzle capable of ejecting the liquid material and a scanning part for moving the first and the second nozzle relatively to the ejection target portion. Among the plurality of the ejection target portions, for a prescribed ejection target portion determined by a prescribed X-coordinate area and a prescribed Y-coordinate area, a first nozzle is positioned at a first X-coordinate in the X-coordinate area, relatively moved in the Y-axial direction and causes the material to land on a plurality of positions of the prescribed ejection target portion in the first scanning period and a second nozzle different from the first nozzle is positioned at a second X-coordinate different from the first X-coordinate in the X-coordinate area, moves in the Y-axial direction and causes the material to land on a plurality of positions of the prescribed ejection target portion in a second scanning period. COPYRIGHT: (C)2010,JPO&INPIT |
