METHOD FOR CLASSIFYING DEFECTS, COMPUTER STORAGE MEDIUM, AND DEVICE FOR CLASSIFYING DEFECTS

摘要

A device for classifying defects comprises a design means and a diagnosis means. In the design means, a model generation section generates a defect model by synthesizing a defect template in a template storage section and an instruction image, and a classification class setting section sets the classification classes of defects by calculating the feature values of the defects in the defect model. The relations between the feature values and classification classes of the defects are stored in a storage section. In the diagnosis means, a feature value calculation section calculates the feature value of a defect from an image of a substrate to be inspected and a classification section classifies the defect of the substrate into the classification class from the relations between the feature values and the classification classes of the defects stored in the storage section based on the feature value of the defect.