| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent barrier film which is prepared by using a silicon oxide film as a barrier layer and is excellent in transparency and barrier property, and to provide a manufacturing method capable of efficiently manufacturing the transparent barrier film. SOLUTION: The transparent barrier film has the barrier layer made by successively laminating at least two layers of silicon oxide film from first layer to n-th layer on one surface or both surfaces of a plastic substrate, wherein a film density of the silicon oxide film of the first layer is higher as compared to the film density of the silicon oxide film other than the first layer. Therein, n denotes an integer of 2 or more. COPYRIGHT: (C)2010,JPO&INPIT
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