| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin sheet type shearing stress sensor whose thickness is about 1 mm, and a distribution type shearing stress sensor formed by arranging them plurally. SOLUTION: A piezoelectric thin plate 11 comprising a piezoelectric material is sandwiched between an upper side transmission plate 16 and a lower side transmission plate 17, and a part of the upper surface of the piezoelectric thin plate 11 is bonded to the under surface of the upper side transmission plate 16 with an upper bonding layer 13, and a part of the under surface of the piezoelectric thin plate 11 is bonded to the lower side transmission plate 17 by a lower bonding layer 14. The upper and lower bonding layers 13, 14 are arranged so as not to be superimposed substantially. A force applied reversely to the upper side transmission plate 16 and the lower side transmission plate 17 respectively by a shearing stress is transferred to the piezoelectric thin plate 11 through the upper and lower bonding layers 13, 14, and the piezoelectric thin plate 11 is compressed or extended, to thereby generate the charge. The charge is output through electrode films 12a 12b, to thereby detect the shearing force. COPYRIGHT: (C)2010,JPO&INPIT
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