| 摘要 |
PROBLEM TO BE SOLVED: To easily perform highly precise photo fabrication. SOLUTION: A mirror 81 deflects a light beam from a light source. A mirror 91 further deflects the light beam deflected by the mirror 81, and irradiates a photo curable resin therewith. A control part 82 rotates the mirror 81 so that an optical axis of the light beam from the light source and a light ray of all the light beams after the deflection by the mirror 81 are contained in the same surface, and a light beam irradiating an ultraviolet curable resin 62 is scanned to a direction of x. A control part 92 rotates the mirror 91 so that an optical axis of a center of the deflection by the mirror 81 and a light ray of all the light beams after the deflection by the optical mirror 91 from the mirror 81 which passes along the optical axis are contained in the same surface, and a light beam irradiating the ultraviolet curable resin 62 is scanned in a direction of z orthogonal to the direction of x. This invention is applicable to a photo fabrication apparatus which performs beam scanning exposure, for example. COPYRIGHT: (C)2010,JPO&INPIT
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