| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive electrode structure for restraining the occurrence of unneeded electrostatic capacitance between conductive layers and preventing a through electrode from being disconnected halfway, and to provide an electronic device and a method of manufacturing the electrode structure. Ž<P>SOLUTION: The electrode structure has: two mounting terminals 23a, 23b for mounting a piezoelectric vibration piece 3 onto a recessed bottom surface of a substrate 21 on which a box-shaped recess 21a is provided at a one main surface side, and one laying wire 25; two through electrodes 24a, 24b at a thickness section between the recessed bottom surface and lower surface of the substrate 21; and two external connection terminals 28a, 28b for electrically connecting the piezoelectric vibration piece 3 to the outside on the lower surface of the substrate 21. In this case, the two through electrodes 24a, 24b have recesses 26a, 26b in a quadrangular pyramid shape of which the aperture continuously expands toward the bottom surface of the recess 21a on the substrate 21. On the inner surface of recesses 26a, 26b, the conductive layer 24c is formed only in a partial region including an incline. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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