OPTICAL SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF

摘要

<P>PROBLEM TO BE SOLVED: To provide an optical semiconductor device provided with a linear waveguide part linearly formed in an inverse mesa direction, and an inclined waveguide part formed in a direction inclined with respect the inverse mesa direction, and capable of suppressing abnormal growth in manufacturing an embedded waveguide, and reducing transmission loss by miniaturizing the device itself. Ž<P>SOLUTION: This optical semiconductor device includes a semiconductor laser 11 formed in the inverse mesa direction, and a waveguide part 12 formed in a direction inclined with respect to the inverse mesa direction. The optical semiconductor device is structured such that the waveguide part 12 includes: a waveguide layer 115 guiding light; the semiconductor laser 11 is formed in a mesa structure; the wave guide part 12 is formed in a mesa structure; the mesa structure of the waveguide part 12 is formed lower than that of the semiconductor laser 11; a semiconductor layer 122 is laminated on a side part of the mesa structure of the semiconductor laser 11; and the mesa structure of the waveguide part 12 is embedded in the semiconductor layer 122. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž