| 摘要 |
A carrier supporting apparatus (10) according to the present invention is configured to support a carrier (C) containing, therein, a plurality of substantially plate-like objects (D) to be processed, such that each object to be processed is arranged vertically at an interval in a horizontal attitude. The carrier includes multiple sets of supporting stages (bottom faces of grooves (1A)) each arranged vertically at an interval, wherein each set of the supporting stages are configured to support the periphery of a bottom face of each one object (D) to be processed. The carrier supporting apparatus comprises a placing table (11) adapted to place the carrier (C) thereon, a lifting member (12) provided such that it can be raised and lowered relative to the placing table, and a drive mechanism adapted to drive the lifting mechanism to be raised and lowered. When raised, the lifting member (12) raises a bottom face of the object (D) to be processed, which is supported on a set of the lowermost supporting stages in the carrier (C), and lifts it up from the supporting stages.
|
