| 摘要 |
PURPOSE: A system and a method for determining acceleration and rotation from an out-of-plane MEMS device are provided to measure acceleration detection independently from rotation detection by forming one inertia measurement unit of three inertia sensors. CONSTITUTION: An MEMS inertia sensor(100) for determining linear acceleration and rotation comprises a first inertial mass(102), a second inertial mass(104), a first electrode pair, a second electrode pair, a third electrode pair, and a fourth electrode pair. The first electrode pair(106,108) is used to apply first linear acceleration re-equilibrant on the first inertial mass. The second electrode pair(110,112) is used to apply second linear acceleration re-equilibrant on the first inertial mass. The third electrode pair is used to apply first deflection re-equilibrant on the first inertial mass. The fourth electrode pair is used to apply second deflection re-equilibrant on the second inertial mass.
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