发明名称 SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a silicon carbide semiconductor device having a vertical power element capable of preventing side electric discharge from occurring. SOLUTION: A conductive layer 9 is formed so that it covers the end face of a semiconductor chip, namely, it is in contact with a back surface electrode 7, entirely covers the end face of an n<SP>+</SP>-type substrate 1 and an n<SP>-</SP>-type drift layer 2, and reaches a passivation film 6. As a result of this, isopotential is attained instantaneously by the conductive layer 9, even if a high voltage is applied to a Schottky electrode 4 and potential is biased at the outer-periphery section of the semiconductor chip. Hence, side electric discharge is made less apt to occurring, and element destruction caused by the side electric discharge is restrained. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009224641(A) 申请公布日期 2009.10.01
申请号 JP20080068831 申请日期 2008.03.18
申请人 DENSO CORP;TOYOTA MOTOR CORP 发明人 ENDO TAKESHI;YAMAMOTO TAKEO;OKUNO HIDEKAZU;FUJIWARA HIROKAZU
分类号 H01L29/47;H01L29/872 主分类号 H01L29/47
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