| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic wave device can sharp laser imprint and a manufacturing method therefor. SOLUTION: The present invention relates to an acoustic wave device and manufacturing method thereof, wherein the acoustic wave device comprising a piezoelectric substrate 10, an acoustic wave element 11 formed on an upper surface of the piezoelectric substrate 10, and an insulating film 20 formed on a lower surface of the piezoelectric substrate 10 and having visible light transmissivity which is smaller than that of the piezoelectric substrate 10. The insulating film 20, having the visible light transmissivity smaller than that of the piezoelectric substrate 10, is formed on the lower surface of or under the piezoelectric substrate 10, thereby readily forming a sharp laser imprint. COPYRIGHT: (C)2010,JPO&INPIT
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