发明名称 |
IMAGE DENSITY-ADAPTED AUTOMATIC MODE SWITCHABLE PATTERN CORRECTION SCHEME FOR WORKPIECE INSPECTION |
摘要 |
An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model parameters from the pattern image of interest and determine the value of a total sum of these identified parameters. This value is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.
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申请公布号 |
US2009245619(A1) |
申请公布日期 |
2009.10.01 |
申请号 |
US20090482836 |
申请日期 |
2009.06.11 |
申请人 |
ADVANCED MASK INSPECTION TECHNOLOGY INC. |
发明人 |
OAKI JUNJI;SUGIHARA SHINJI |
分类号 |
G06K9/00;G01N21/956;G03F1/84;G06T1/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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