| 摘要 |
PROBLEM TO BE SOLVED: To provide a new contact area measuring device. SOLUTION: This contact area measuring device has: an optically transparent substrate 6 in contact with a sample 7; an irradiation means for irradiating white light to the optically transparent substrate 6 from the opposite side to the sample 7; an interference image acquisition means 11 for acquiring an interference image generated from reflected light from the sample 7 and reflected light from the optically transparent substrate 6; a brightness value histogram creation means for creating a brightness value histogram from brightness value information of the interference image; and a contact area operation means for calculating the contact area from the brightness value histogram. In this case, the interference image acquisition means 11 acquires the interference image and the brightness value information of the interference image. The brightness value histogram creation means separates the brightness value information of the interference image into RGB brightness value information, and creates a G-brightness value histogram. The contact area operation means separates the brightness value histogram into a plurality of normal distributions by complex normal distribution optimization approximation, and calculates the contact area from a normal distribution on the lowest brightness side among them. COPYRIGHT: (C)2010,JPO&INPIT |
