ACCELERATION SENSOR ELEMENT, ACCELERATION SENSOR DEVICE AND METHOD FOR MANUFACTURING ACCELERATION SENSOR ELEMENT

摘要

Provided is an acceleration sensor element, an acceleration sensor device and a method for manufacturing an acceleration sensor element that can be miniaturized while maintaining a detection sensitivity. An acceleration sensor element (20) is provided with a weight unit (1); a fixing unit (3) for surrounding the weight unit (1); a beam unit (2), at one end of which the fixing unit (3) is connected but at the other end of which the weight unit is connected; a projection unit (6) arranged at the beam unit (2); and resistor elements (Rx1-Rx4, Ry1-Ry4, Rz1-Rz4) arranged on the upper surface of the projection unit (6).