LOOP ELEMENT AND NOISE ANALYZER

摘要

Provided is a loop element equipped with a shield structure. The loop element can suppress noise introduced via a silicon substrate and can be made by a semiconductor process. The loop element includes a first well of a first polarity formed on the substrate; a deep well of a second polarity formed below the first well; a ring-shaped second well of the second polarity, which is formed on the deep well and surrounds the periphery of the deep well; a third well of the first polarity formed in an island-like area that the deep well and the second well surround; a loop-shaped conductor formed on a higher layer than where the third well is formed; and a first path connecting the second well to a bias supply. The outside dimension of the loop-shaped conductor is smaller than that of the third well. The second well is electrically connected to the deep well.