| 摘要 |
PURPOSE: An edge frame and a substrate processing apparatus comprising the same are provided to improve the productivity by reducing the replacing time. CONSTITUTION: An edge frame(100) is installed in the inside of chamber and covers the edge of a substrate in a process. The edge frame includes a body portion(110), a substrate screen part(120), and a floating member(130). The body portion includes a hollow(112) and a bonding groove(114). The hollow is formed in an inside and surrounds the opening formed in the center. The bonding groove communicates with a hollow and is formed in the bottom surface. The substrate screen part is extended from the body portion to an opening. The substrate screen part is thin compared with the body portion.
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