| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate inspection device and a substrate inspection method capable of highly efficiently executing inspection before component mounting when a substrate is reentered, and preventing a system error. <P>SOLUTION: An inspection process (steps ST4-ST6) before component mounting for all component mounting positions L on which components are to be mounted is performed when a reenter mode is not set by operation of a reenter switch 22, a recognition camera 11 is first caused to recognize the component mounting position L and then a component presence inspection process (step ST8 and step ST9) which inspects whether or not the component P is mounted on the component mounting position L is performed when the reenter mode is set by the reenter switch 22, and, the inspection process (steps ST4-ST6) before component mounting is performed for the component mounting position L on which the component is not mounted. <P>COPYRIGHT: (C)2010,JPO&INPIT |
