| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage mechanism in which a drift is small while being stopped, and to provide an electron microscope provided with the mechanism. SOLUTION: A test-piece stage is provided with a plurality of driving elements which can conduct an expansion and contraction or a rocking and in which a stage can be shifted by co-working of the above two driving elements. In the stage mechanism, by the co-working of the above driving elements, various kinds of controls can be done by combining workings of the above two driving elements, and as a result, not only a shift of the stage but also a control of a drift while being stopped are made possible. COPYRIGHT: (C)2010,JPO&INPIT |
