| 摘要 |
PROBLEM TO BE SOLVED: To shorten an approach time, concerning a control method for the distance between a probe of a scanning probe microscope and a sample surface, and to provide the scanning probe microscope. SOLUTION: This scanning probe microscope for scanning the sample surface, by using the probe and measuring irregularities of the sample surface with atomic resolution has, as a first stage, a first control means operated in AC mode AFM, for calculating the phase difference between an excitation signal to the probe 6 and a signal, obtained by detecting the signal from the probe 6 by a photodetector 7, and performing feedback control by the AC mode AFM, until a prescribed change of phase difference signal is detected; and has, as the second stage, a second control means for performing feedback control, by using a sample surface observation feedback signal, which is an output from the photodetector 7 by switching the mode to contact mode AFM, and controlling the distance between the probe and the sample surface. COPYRIGHT: (C)2010,JPO&INPIT
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