| 摘要 |
A method of raster scanning a sample on a continuously moving stage for charged-particle beam imaging said sample is disclosed. The method includes line scanning a charged-particle beam across a surface of the sample repeatedly to form on the surface at least one 2-dimensional line array composed of scan lines lying adjacent to each other. When each line scan is to be performed, the charged-particle beam is shifted, along the stage-moving direction, by an extra predefined distance at least equal to a distance the stage has traveled during a time period from the beginning of the first line scan of the first formed line array to the beginning of the current line scan (to be performed) of the current line array (to be formed).
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