| 摘要 |
A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods are operable to determine linear acceleration and rotation. An exemplary embodiment applies a first linear acceleration rebalancing force via a first electrode pair to a first proof mass, applies a second linear acceleration rebalancing force via a second electrode pair to a second proof mass, applies a first Coriolis rebalancing force via a third electrode pair to the first proof mass, applies a second Coriolis rebalancing force via a fourth electrode pair to the second proof mass, determines a linear acceleration corresponding to the applied first and second linear acceleration rebalancing forces, and determines a rotation corresponding to the applied first and second Coriolis rebalancing forces.
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