| 摘要 |
A coating thickness monitor is disclosed that includes at least one radiation source directed at least a portion of the substrate. The coating thickness monitor includes at least one probe for capturing at least a portion of the radiation reflected and refracted by the coating on the substrate. The captured radiation is at least a portion of the radiation directed to the substrate from the radiation source. Further, the coating thickness monitor includes at least one detector in communication with the at least one probe, the at least one detector capable of processing the captured radiation to allow a determination of the thickness.
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