Doping area of body by using doping agent for doping wafers, preferably wafers of pure elements or alloys, particularly crystalline or polycrystalline silicon or germanium wafers, involves providing doping film having carrier film

摘要

Body area doping involves providing doping film (1a) having a carrier film (10) and a doping layer (2a), which contains a doping agent. The doping film and a body are assembled such that the carrier film is turned away from the body. The doping agent is diffused into area of the body by using heat, laser irradiation, microwave radiation or by applying a magnetic field.