发明名称 |
ON-THE-FLY MANIPULATION OF SPOT SIZE AND CUTTING SPEED FOR REAL-TIME CONTROL OF TRENCH DEPTH AND WIDTH IN LASER OPERATIONS |
摘要 |
Systems and methods cut trenches of multiple widths in a material using a single pass of a laser beam. A first series of laser pulses cut a work surface of the material at a first cutting speed using a first spot size. In a transition region from a first trench width to a second trench width, a second series of laser pulses sequentially change spot sizes while gradually changing from the first cutting speed to a second cutting speed. Then, a third series of laser pulses continue to cut the work surface at the second cutting speed using a second spot size. The method provides for increased depth control in the transition region. A system uses a selectively adjustable optical component in the laser beam path to rapidly change spot size by adjusting a position of a focal plane with respect to the work surface.
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申请公布号 |
US2009242521(A1) |
申请公布日期 |
2009.10.01 |
申请号 |
US20080060043 |
申请日期 |
2008.03.31 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
ALPAY MEHMET E.;JOHANSEN BRIAN;CHILDERS DAVID |
分类号 |
B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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