| 发明名称 |
Electroactive polymers for lithography |
| 摘要 |
Systems and methods for lithography include actuating an electroactive polymer member to position mask and/or substrate.
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| 申请公布号 |
US2009242806(A1) |
申请公布日期 |
2009.10.01 |
| 申请号 |
US20090384478 |
申请日期 |
2009.04.03 |
| 申请人 |
|
发明人 |
HYDE RODERICK A.;MYHRVOLD NATHAN P. |
| 分类号 |
A61N5/00 |
主分类号 |
A61N5/00 |
| 代理机构 |
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代理人 |
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