| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist composition excellent in sensitivity, resolution, LER (line edge roughness), pattern features and outgas properties. <P>SOLUTION: The resist composition contains (A) a resin containing a repeating unit expressed by general formula (I) and (B) a compound expressed by general formula (II). In formulae, each note represents a predetermined element or group. <P>COPYRIGHT: (C)2010,JPO&INPIT |
