| 摘要 |
A magnetic sensor which allows magnetic measurement of not only conductive materials but also non-conductive materials over a wide temperature range in an exceptionally simple configuration, while exhibiting high performance and enhanced reliability, and a scanning microscopy using such a magnetic sensor. The scanning microscopy includes a magnetic detector element mounted on a free-end portion of a cantilevered flexible member, a magnetic sensor with a strain gauge mounted on the flexible member, a drive means to drive the flexible member and a sample to be measured, and a control means to control a drive of the drive means on the basis of an output signal from the strain gauge. |
