| 摘要 |
<P>PROBLEM TO BE SOLVED: To drive a liquid ejection head using an electrostatic actuator at high speed. Ž<P>SOLUTION: The liquid ejection head includes a variable electrode 5 and a counter electrode 7 that is a fixed electrode opposed to the variable electrode 5 through a predetermined gap 6, and then a film 5b having tensile stress only at an end in a short side direction of a liquid chamber side surface of a plate part 5a constituting the variable electrode 5 is provided as structure for suppressing displacement of the variable electrode 5 to a liquid chamber 3 side at the end in the short side direction of the liquid chamber of the variable electrode 5 on the liquid chamber side, so as to physically suppress the displacement of the variable electrode 5 to a reverse side to the counter electrode 7 during residual vibration. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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