| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for inspecting an edge of a surface to be inspected, capable of effectively eliminating scattered light that occurs on the border and the bending portion of a film that is present on the edge of the surface to be inspected. Ž<P>SOLUTION: An optical system for monitoring a film position is located on the front side of a device for detecting a defect, and thereby the film border 12 and the bending portion 13 of the film 11 formed on a wafer 10 are detected. From this detected position, elements 33B, 33A of a transmissive liquid crystal element 33 corresponding to the film border 12 and the bending portion 13 of the film 11 are made non-transmissive so that light illuminating an illumination field 35 for the film border 12 and the bending portion 13 of the film 11 is shielded at an inspection point. This allows illuminating portions for the film border 12 and the inclination starting point 13 of a bevel to be light-shielding portions 38, 39. Thus, the scattered light that occurs on the film border 12 and at the inclination starting point 13 of a bevel is prevented, so that the S/N in the inspection is improved. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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