| 摘要 |
The vibrations of a second table supported on a first table that is movable in one horizontal direction can be controlled. A stage device includes an XY axis table movable in the X-direction, a Z-axis table supported by a support portion on the XY axis table, a pair of scales that are arranged apart from each other in the X-direction and detect the Z-direction velocity on the Z-axis table, a pair of motors that are arranged apart from each other in the X-direction and drive the Z-axis table in a vertical direction on the Z-axis-table, and a controller controls the drives of the motors based on the Z-direction velocity detected, in which the behavior of pitching vibrations in the Z-axis table is determined by detecting the Z-direction velocity with the scales, and the motors are driven and then the Z-axis table is rotated in a pitching direction so that the pitching vibrations are cancelled.
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